top of page
RESEARCH FACILITIES
Sputtering and thermal evaporation systems
Our team possess seven sputtering systems, each equipped with multiple guns, allowing us to deposit a diverse range of magnetic films and solar cell films.
本團隊擁有七台真空鍍膜系統，並配備有多種不同元素靶，使我們能夠沉積各種磁性薄膜和太陽能電池薄膜。
Sputtering System No. 1
Sputtering System No. 2
Zhong Dian Sputtering System
Inline sputtering system
Co-sputtering system
Apollo sputtering system
Herli sputtering system
thermal evaporator
Annealing systems
HV Field Anneal
Field Anneal
RTA
Measurement equipment
本團隊擁有多種元素分析設備和磁性質分析設備，並能提供精確的分析服務：
(1)元素分析設備：ICP, XRF
(2)磁性質分析設備：VSM, AFM, permeability measurements
ICP
MOKE
AFM/MFM
Probe station
AGM/VSM
Equal potention
MOKE
Solar simulator
NanoMOKE
VSM
Solar simulator
Probe Station
Network Analysis
bottom of page